ISHII Hiromu | NTT Microsystem Integration Laboratories
スポンサーリンク
概要
関連著者
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ISHII Hiromu
NTT Microsystem Integration Laboratories
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KUDOU Kazuhisa
NTT Advanced Technology Corp.
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Sato Norio
Ntt Microsystem Integration Lab. Kanagawa Jpn
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SAKATA Tomomi
NTT Microsystem Integration Laboratories
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MACHIDA Katsuyuki
NTT Microsystem Integration Laboratories
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KAMEI Toshikazu
NTT Advanced Technology Corp.
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MACHIDA Katsuyuki
NTT Advanced Technology Corporation
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Kuwabara Kei
Ntt Microsystem Integration Laboratories Ntt Corporation
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Yano Masaki
NTT Advanced Technology Corp.
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Machida Katsuyuki
NTT Advanced Technology Corp.
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SATO Norio
NTT Microsystem Integration Labs.
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Yano Masaki
Ntt Advanced Technology Corporation
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Sato Norio
Ntt Corp. Kanagawa Jpn
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YANO Masaki
NTT Advanced Technology Corporation, NTT Corporation
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Ishii Hiromu
Ntt Microsystem Integration Laboratories Ntt Corporation
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Machida K
Ntt Advanced Technology Corporation
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SHIMAMURA Toshishige
NTT Microsystem Integration Laboratories
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MORIMURA Hiroki
NTT Microsystem Integration Laboratories
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Kudou Kazuhisa
Ntt Advanced Technology Corporation
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URANO Masami
NTT Microsystem Integration Laboratories
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KUWABARA Kei
NTT Microsystem Integration Laboratories, NTT Corporation
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Sahri N
Ntt Microsystem Integration Laboratories Ntt Corporation
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Kamei Toshikazu
Ntt Advanced Technology Corporation
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町田 憲一
阪大先端セ
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Nagase Masao
Ntt Basic Research Laboratories
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Kodate Junichi
Ntt Microsystem Integration Laboratories Ntt Corporation
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OKABE Yuichi
NTT Microsystem Integration Labs.
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Shimoyama Nobuhiro
Ntt Microsystem Integration Laboratories
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Kodate Junichi
Ntt Microsystem Integration Laboratories
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Okabe Yuichi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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KYURAGI Hakaru
NTT Microsystem Integration Laboratories
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Morimura Hiroki
Ntt Microsystem Integration Laboratories Ntt Corporation
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Ono Kazuyoshi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Shigematsu Satoshi
Ntt Microsystem Integration Lab. Kanagawa Jpn
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Tazawa Hiroshi
Misuzu Industries Corporation
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CHINO Mitsuru
Misuzu Industries Corporation
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SHIMADA Teruo
Misuzu Industries Corporation
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Urano Masami
Ntt Microsystem Integration Laboratories Ntt Corporation
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Shimoyama Nobuhiro
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Takagahara Kazuhiko
NTT Microsystem Integration Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Sato Norio
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ishii Hiromu
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Machida Katsuyuki
NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Machida Katsuyuki
NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan
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Machida Katsuyuki
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Shigematsu S
Ntt Microsystem Integration Laboratories
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SHIMOYAMA Nobuhiro
NTT Microsystem Integration Laboratories, NTT Corporation
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Minotani Tadashi
Ntt Microsystem Integration Laboratories Ntt Corporation
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Minotani Tadashi
Ntt Microsystem Integration Labs.
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SATO Yasuhiro
NTT Microsystem Integration Laboratories
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Yagi Shoji
Ntt Microsystem Integration Labs.
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Uenishi Yuji
Ntt Microsystem Integration Laboratories
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Kyuragi H
Ntt Microsystem Integration Laboratories Ntt Corporation
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JIN Yoshito
NTT Microsystem Integration Laboratories
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NAGATSUMA Tadao
The author is with NTT Telecommunications
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ROYTER Yakov
NTT Microsystem Integration Labs.
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YAGI Shouji
NTT Microsystem Integration Labs.
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NAGATSUMA Tadao
NTT Advanced Technology Corp.
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Nagatsuma T
Ntt Advanced Technology Corp.
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Yamaguchi Joji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Tsuchiya Toshiaki
Interdisciplinary Faculty Of Science And Engineering Shimane University
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Terada Jun
Ntt Microsystem Integration Laboratories Ntt Corp.
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Shimoyama Nobuhiro
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Shimoyama Nobuhiro
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Tazawa Hiroshi
Misuzu Industries Corporation, 1536 Nakaminowa, Minowa-machi, Kamiina-gun, Nagano 399-4601, Japan
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Kudou Kazuhisa
NTT Advanced Technology Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0124, Japan
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Kuwabara Kei
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kuwabara Kei
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Kyuragi Hakaru
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kawagoe Masafumi
Research and Development Center, Dainippon Screen MFG Co., Ltd., 322 Furukawa-cho, Hazukashi, Fushimi-ku, Kyoto 612-8486, Japan
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Adachi Hideki
Research and Development Center, Dainippon Screen MFG Co., Ltd., 322 Furukawa-cho, Hazukashi, Fushimi-ku, Kyoto 612-8486, Japan
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Saito Hidenori
Fundamental Research Laboratory, Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Shigematsu Satoshi
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Urano Masami
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Tanabe Yasuyuki
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kamei Toshikazu
NTT Advanced Technology Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0124, Japan
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Adachi Hideki
Research and Development Center, Dainippon Screen Mfg. Co., Ltd., 322 Furukawa-cho, Hazukashi, Fushimi-ku, Kyoto 612-8486, Japan
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Yano Masaki
NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan
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Sato Norio
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Sato Norio
NTT Microsystem Integration Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Ishii Hiromu
NTT Microsystem Integration Labs.
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Ishii Hiromu
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ishii Hiromu
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Shimamura Toshishige
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kawagoe Masafumi
Research and Development Center, Dainippon Screen Mfg. Co., Ltd., 322 Furukawa-cho, Hazukashi, Fushimi-ku, Kyoto 612-8486, Japan
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Yamaguchi Joji
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Terada Jun
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Machida Katsuyuki
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Morimura Hiroki
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Morimura Hiroki
NTT Microsystem Integration Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ishimura Yoji
Fundamental Research Laboratory, Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Asakuma Sumitoshi
Fundamental Research Laboratory, Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Machida Katsuyuki
NTT Advanced Technology Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0124, Japan
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Jin Yoshito
NTT Microsystem Integration Laboratories, Atsugi, Kanagawa 243-0198, Japan
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NAGASE Masao
NTT Basic Research Labs.
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Tsuchiya Toshiaki
Interdisciplinary Graduate School of Science and Engineering, Shimane University, 1060 Nishikawatsu-cho, Matsue 690-8504, Japan
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Shimada Teruo
Misuzu Industries Corporation, 1536 Nakaminowa, Minowa-machi, Kamiina-gun, Nagano 399-4601, Japan
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Sakata Tomomi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Sakata Tomomi
NTT Microsystem Integration Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Nagase Masao
NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
著作論文
- Novel Packaging Technology for Microelectromechanical-System Devices
- Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
- Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
- Thick Au High-Q Inductor and Its Chip-on-Chip Bonding on an RF IC for Various Frequencies
- RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration
- Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
- Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices
- Integrated RF-MEMS Technology with Wafer-Level Encapsulation
- Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- Microfabrication Technology for Millimeter-Wave Photonic Systems on Si
- Conformal Coating of Organic Dielectric Film on Gold Electrodes in Microelectromechanical System Devices by Electrodeposition
- Surface Cleaning of Gold Structure by Annealing during Fabrication of Microelectromechanical System Devices
- Selective Removal of Dry-Etching Residue Derived from Polymer Sacrificial Layer for Microelectromechanical-System Device Fabrication
- Removal of Gold Oxide by Low-Temperature Hydrogen Annealing for Microelectromechanical System Device Fabrication
- Characterization of Air-Gap Sealing with Organic Dielectric Using Spin-Coating Film Transfer and Hot-Pressing Technology
- The Effect of Thick Interconnections Formed by Gold Electroplating on the Characteristics of Metal–Oxide–Semiconductor Field-Effect Transistors
- Novel Packaging Technology for Microelectromechanical-System Devices
- Electrodeposition of Water-Repellent Organic Dielectric Film as an Anti-Sticking Coating on Microelectromechanical System Devices
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
- Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
- Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator
- Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices