KAMEI Toshikazu | NTT Advanced Technology Corp.
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概要
関連著者
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KAMEI Toshikazu
NTT Advanced Technology Corp.
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KUDOU Kazuhisa
NTT Advanced Technology Corp.
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ISHII Hiromu
NTT Microsystem Integration Laboratories
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MACHIDA Katsuyuki
NTT Microsystem Integration Laboratories
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Sato Norio
Ntt Microsystem Integration Lab. Kanagawa Jpn
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Yano Masaki
NTT Advanced Technology Corp.
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Yano Masaki
Ntt Advanced Technology Corporation
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MORIMURA Hiroki
NTT Microsystem Integration Laboratories
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YANO Masaki
NTT Advanced Technology Corporation, NTT Corporation
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SATO Norio
NTT Microsystem Integration Labs.
著作論文
- Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
- Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
- RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration
- Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
- Integrated RF-MEMS Technology with Wafer-Level Encapsulation
- Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- The Effect of Thick Interconnections Formed by Gold Electroplating on the Characteristics of Metal–Oxide–Semiconductor Field-Effect Transistors
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes