Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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Nagase Masao
Ntt Basic Research Laboratories
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SAKATA Tomomi
NTT Microsystem Integration Laboratories
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ISHII Hiromu
NTT Microsystem Integration Laboratories
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MACHIDA Katsuyuki
NTT Microsystem Integration Laboratories
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YANO Masaki
NTT Advanced Technology Corporation, NTT Corporation
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OKABE Yuichi
NTT Microsystem Integration Labs.
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KAMEI Toshikazu
NTT Advanced Technology Corp.
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KUDOU Kazuhisa
NTT Advanced Technology Corp.
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Yano Masaki
Ntt Advanced Technology Corporation
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Kudou Kazuhisa
Ntt Advanced Technology Corporation
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Ishii Hiromu
Ntt Microsystem Integration Laboratories Ntt Corporation
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Machida K
Ntt Advanced Technology Corporation
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Kamei Toshikazu
Ntt Advanced Technology Corporation
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Yano Masaki
NTT Advanced Technology Corp.
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Okabe Yuichi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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