A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon
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概要
- 論文の詳細を見る
The new type of coplanar waveguide for millimeter-wave transmission was fabricated on silicon by chemical mechanical polishing and selective electroplating processes based on silicon technology. The thick interconnections obtained using these processes have less conductor loss than the conventional interconnections, and the deep grooves on both sides of a signal line in this new waveguide reduce the dielectric loss caused by the high permittivity of the silicon substrate. The electro-optic sampling technique confirmed that the new waveguide has excellent millimeter-wave propagation characteristics, low effective permittivity and low attenuation, at frequencies up to 300 GHz. The new fabrication processes should be useful in combining millimeter-wave systems with ultralarge-scale integrated circuits on silicon.
- 社団法人応用物理学会の論文
- 2000-04-30
著者
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NAGATSUMA Tadao
NTT Telecommunications Energy Laboratories, NTT Corporation
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SAITO Kunio
NTT Telecommunications Energy Laboratories, NTT Corporation
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KUDO Kazuhisa
NTT Advanced Technology Corporation, NTT Corporation
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YANO Masaki
NTT Advanced Technology Corporation, NTT Corporation
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ISHII Hiromu
NTT Telecommunications Energy Laboratories, NTT Corporation
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MACHIDA Katsuyuki
NTT Telecommunications Energy Laboratories, NTT Corporation
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KYURAGI Hakaru
NTT Telecommunications Energy Laboratories, NTT Corporation
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MACHIDA Katsuyuki
NTT Advanced Technology Corporation
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Yagi Shoji
Ntt Microsystem Integration Labs.
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Yano Masaki
Ntt Advanced Technology Corporation
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Saito Kunio
Ntt Telecommunications Energy Laboratories Ntt Corporation
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Kudou Kazuhisa
Ntt Advanced Technology Corporation
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Kyuragi H
Ntt Microsystem Integration Laboratories Ntt Corporation
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SAHRI Nabil
NTT Telecommunications Energy Laboratories
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NAGATSUMA Tadao
The author is with NTT Telecommunications
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YAGI Shouji
NTT Telecommunications Energy Laboratories
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NAGATSUMA Tadao
NTT Advanced Technology Corp.
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Nagatsuma T
Ntt Advanced Technology Corp.
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Nagatsuma Tadao
Ntt Telecommunications Energy Laboratories
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Ishii Hiromu
Ntt Microsystem Integration Laboratories Ntt Corporation
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Machida K
Ntt Advanced Technology Corporation
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Yano Masaki
NTT Advanced Technology Corp.
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KUDO Kazuhisa
NTT Advanced Technology Corporation
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Machida Katsuyuki
NTT Telecommunications Energy Laboratories, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kyuragi Hakaru
NTT Telecommunications Energy Laboratories, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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