Synchronized Multiple-Array Vibrational Device for Microelectromechanical System Electrostatic Energy Harvester
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概要
- 論文の詳細を見る
In this paper, we describe a novel structure of a vibrational micro-electro-mechanical system (MEMS) device for power generation enhancement. A synchronized multiple-array vibrational device, in which movable plates are connected by rods, increases the area of the movable plate in the energy conversion region and couples the phase of movement. The fabricated device resonates at approximately 1430 Hz with an acceleration amplitude of 6 m/s2 and nanoampere-order AC current is generated. These results confirm that this MEMS vibrational device will contribute to the progress in energy harvesting.
- 2012-05-25
著者
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SAKATA Tomomi
NTT Microsystem Integration Laboratories
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SHIMAMURA Toshishige
NTT Microsystem Integration Laboratories
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SATO Yasuhiro
NTT Microsystem Integration Laboratories
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JIN Yoshito
NTT Microsystem Integration Laboratories
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Sato Norio
Ntt Microsystem Integration Lab. Kanagawa Jpn
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Kodate Junichi
Ntt Microsystem Integration Laboratories
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Ugajin Mamoru
Ntt Microsystem Integration Laboratories
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Ugajin Mamoru
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Mutoh Shin'ichiro
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Ono Kazuyoshi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ono Kazuyoshi
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Shimamura Toshishige
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Jin Yoshito
NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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