Nanometrology of Si Nanostructures Embedded in SiO_2 using Scanning Electron Microscopy
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-01-15
著者
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Nagase Masao
Ntt Basic Research Laboratories
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Nagase Masao
Ntt Basic Research Laboratories Ntt Corporation
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Fujiwara Akira
NTT Basic Research Laboratories, NTT Corporation
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NAMATSU Hideo
NTT Basic Research Laboratories
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Fujiwara Akira
Ntt Basic Research Laboratories Ntt Corporation
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KURIHARA Kenji
NTT Advanced Technology Corporation
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Namatsu H
Ntt Basic Research Laboratories Ntt Corporation
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