Fabrication of double-dot single-electron transistor in silicon nanowire
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概要
- 論文の詳細を見る
We propose a simple method for the fabrication of Si single-electron transistors (SET) with coupled dots by means of pattern-dependent oxidation (PADOX). It is well known that the PADOX convert a small one-dimensional Si wire formed on a silicon-on-insulator (SOI) substrate into a SET automatically. We demonstrated a fabrication of a double-dot Si SET when we oxidized specially designed Si nanowires formed on SOI substrates. We analyzed the measured electrical characteristics by fitting the simulation results and confirmed the double-dot formation and the position of the two dots in the Si wire.
- 社団法人電子情報通信学会の論文
- 2009-06-17
著者
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Arita Masashi
Graduate School Of Information Science And Technology Hokkaido Univ.
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Ono Yukinori
NTT Basic Research Laboratories
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Inokawa Hiroshi
Research Institute of Electronics, Shizuoka University
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Ono Yukinori
Ntt Basic Research Laboratories Nippon Telegraph And Telephone Corporation
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Ono Yukinori
Ntt Basic Research Laboratories Ntt Cornoration
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Inokawa Hiroshi
Research Institute Of Electronics Shizuoka Univ.
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TAKAHASHI Yasuo
Graduate School of Information Science and Technology, Hokkaido University
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Choi Jung-bum
Physics And Research Institute Of Nanoscience And Technology
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Takahashi Y
Hokkaido Univ. Sapporo‐shi Jpn
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Arita Masashi
Graduate School Of Engineering Hokkaido University
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Inokawa H
Research Institute Of Electronics Shizuoka Univ.
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Takahashi Y
Ntt Basic Research Laboratories Ntt Cornoration
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Takahashi Y
Osaka University
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Fujiwara Akira
NTT Basic Research Laboratories, NTT Corporation
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Jo Mingyu
Graduate School of Information Science and Technology, Hokkaido Univ.
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Kaizawa Takuya
Graduate School of Information Science and Technology, Hokkaido Univ.
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Kaizawa Takuya
Graduate School Of Information Science And Technology Hokkaido Univ.
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Jo Mingyu
Graduate School Of Information Science And Technology Hokkaido Univ.
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Fujiwara A
Ntt Basic Research Laboratories Ntt Corporation
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Fujiwara A
Ntt Corp. Atsugi Jpn
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Takahashi Yasuo
Graduate School Of Information Science And Technology Hokkaido Univ.
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Fujiwara Akira
Ntt Basic Research Laboratories Ntt Corporation
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Takahashi Y
Graduate School Of Information Science And Technology Hokkaido Univ.
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Takahashi Yasuo
The Tokyo Metropolitan Research Laboratory Of Public Health:graduate School Of Nutritional And Envir
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Takahashi Yasuo
Faculty Of Pharmaceutical Sciences Tokyo University Of Science
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Takahashi Yasuo
Graduate School of Engineering, Oita University
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