Height Dependence of Young's Modulus for Carbon Nanopillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition
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概要
- 論文の詳細を見る
We investigated the height dependence of the Young's modulus for carbon nanopillars grown by focused-ion-beam-induced chemical vapor deposition (FIB-CVD) using phenanthrene gas as a source material. Carbon nanopillars of different heights were grown by FIB-CVD at various growth times and a fixed ion-beam focal point. The growth heights ranged from 3.6 to 35.6 μm. The diameters at the bottoms of the pillars were nearly the same, 100 nm, and it increased as the growth progressed. Young's modulus of the carbon nanopillars was evaluated from resonant frequency for mechanical vibration using uniform and nonuniform models. Young's moduli differed for different growth heights for both of the models.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-06-25
著者
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Nagase Masao
Ntt Basic Research Laboratories
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YAMAGUCHI Hiroshi
NTT Basic Research Laboratories
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Ishihara Sunao
The University Of Tokyo
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Tamaru Kojiro
NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
-
Nonaka Keiichiro
NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ishihara Sunao
The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Warisawa Shin'ichi
The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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