Resist Coating on Vertical Side Faces Using Conventional Spin Coating for Creating Three-Dimensional Nanostructures in Semiconductors
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概要
- 論文の詳細を見る
- 2010-10-25
著者
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YAMAGUCHI Hiroshi
NTT Basic Research Laboratories
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YAMAZAKI Kenji
NTT Basic Research Laboratories
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Yamazaki Kenji
Ntt Basic Research Laboratories Ntt Corporation
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