Flexible Nanofabrication in Three-Dimensional Electron-Beam Lithography Enhanced by Suppression of Proximity Effect
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2008-09-25
著者
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YAMAGUCHI Hiroshi
NTT Basic Research Laboratories
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YAMAZAKI Kenji
NTT Basic Research Laboratories
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Yamazaki Kenji
Ntt Corp. Kanagawa Jpn
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Yamaguchi Hiroshi
Ntt Basic Research Laboratories Nippon Telegraph And Telephone Corp.
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