Fabrication of Nanomechanical Structures from Bulk-GaAs Using Angled Ion Etching
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-06-25
著者
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YAMAGUCHI Hiroshi
NTT Basic Research Laboratories
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OKAMOTO Hajime
NTT Basic Research Laboratories
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YAMAZAKI Kenji
NTT Basic Research Laboratories
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Okamoto Hajime
Ntt Basic Research Laboratories Ntt Corporation
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Yamazaki Kenji
Ntt Basic Research Laboratories Ntt Corporation
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Singh Vijay
Ntt Basic Research Laboratories Ntt Corporation
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TAWARA Takehiko
NTT Basic Research Laboratories, NTT Corporation
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Tawara Takehiko
Ntt Basic Research Laboratories Ntt Corporation
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Tawara Takehiko
Ntt Basic Res. Lab. Kanagawa Jpn
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