Investigations of Local Surface Properties by SNOM Combined with KFM Using a PZT Cantilever(Special Issue on Near-Field Optics and Its Applications)

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概要

• 論文の詳細を見る

• Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.

• 社団法人電子情報通信学会の論文
• 2002-12-01

著者

• 山田 弘司

  核融合科学研究所

• 松重 和美

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• 山田 啓文

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• 松重 和美

  京都大学大学院工学研究科

• 山田 啓文

  京都大学工学研究科電子工学専攻

• Kinoshita K

  Ntt Basic Research Laboratory

• Kobayashi K

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• Fukuma T

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• Fujii T

  Japan Telecom Co. Ltd. Tokyo Jpn

• 山田 啓文

  Department Of Electronic Science And Engineering Kyoto University

• Fujii T

  Nikon Corporation

• Hamada Y

  Nagoya Municipal Industrial Res. Inst. Nagoya Jpn

• YAMADA HIROFUMI

  Department of Surgery, Saitama Medical Center, Saitama Medical School

• MATSUSHIGE Kazumi

  Department of Electronic Science and Engineering, Kyoto University

• KOBAYASHI Kei

  International Innovation Center, Kyoto University

• SATOH Nobuo

  Department of Electronic Science and Engineering, Kyoto University

• WATANABE Shunji

  Nikon Corporation

• FUJII Toru

  Nikon Corporation

• HAMADA Yasuji

  National Institute for Fusion Science

• Yamada H

  Department Of Electronics Nagoya University

• Kobayashi K

  Kobe Steel Ltd. Kobe Jpn

• 松重 和美

  京都大学工学研究科電子物性工学専攻

• Kishio Kohji

  Department Of Applied Chemistry University Of Tokyo:sorst Japan Science And Technology Corporation (

• Kamigaki K

  College Of Liberal Arts Toyama University

• Kinoshita K

  Ntt Basic Research Laboratories

• Kudoh Kazuhide

  Department Of Applied Physics Tokyo University Of Science

• Watanabe Souichi

  The Niigata Institute Of Technology

• Kunihiro Kazuaki

  Optoelectronics And High Frequency Device Research Laboratories Nec Corporation

• Matsushige Kazumi

  Department Of Applied Science Faculty Of Engineering Kyushu University

• Kitazawa Koichi

  Ntt Basic Research Laboratories

• Kurihara K

  Ntt Basic Research Laboratories

• Kobayashi Keiji

  Toshiba Research And Development Center

• Satoh Nobuo

  Department Of Electronic Science And Engineering Kyoto University

• Fujii T

  Department Of Electronic Science And Engineering Kyoto University

• Watanabe S

  Fujitsu Lab. Ltd. Kawasaki‐shi Jpn

• Yamada Hirofumi

  Department Of Electronics Science And Engineering Kyoto University

• 山田 弘司

  Department Of Electronic Science And Engineering Kyoto University

• 山田 弘司

  自然科学研究機構 核融合科学研究所 ヘリカル研究部

• Yamada Hirofumi

  Department of Electrical Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan

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