A Novel Fabrication Method for Polycrystalline Silicon Thin-Film Transistors with a Self-Aligned Lightly Doped Drain Structure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-01-30
著者
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Nunoshita M
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Kobayashi K
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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Nunoshita M
Mitsubishi Electric Corp. Hyogo Jpn
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Nunoshita Masahiro
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Nunoshita Masahiro
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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NUNOSHITA Masahiro
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Kamigaki K
College Of Liberal Arts Toyama University
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KOBAYASHI Kazuhiro
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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MURAI Hiroyuki
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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SAKAMOTO Takao
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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BAERT Kris
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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TOKIOKA Hidetada
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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SUGAWARA Takashi
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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MATSUTANI Yuuichi
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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NAMIZAKI Hirofumi
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Kudoh Kazuhide
Department Of Applied Physics Tokyo University Of Science
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Kunihiro Kazuaki
Optoelectronics And High Frequency Device Research Laboratories Nec Corporation
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Sakamoto Toshitugu
Faculty Of Engineering Science Osaka University
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Baert Kris
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation : (present Address) In
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Murai Hiroyuki
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Shiokawa Takao
Semiconductor Laboratory Riken The Institute For Physical And Chemical Research
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Sakamoto T
Department Of Communication Engineering Faculty Of Computer Science And System Engineering Okayama P
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Sugawara T
Central Research Institute Mitsubishi Materials Co. Ltd.
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Matsutani Yuuichi
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Namizaki Hirofumi
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Tokioka Hidetada
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Sugawara Takashi
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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