A Novel Fabrication Method for Polycrystalline Silicon Thin-Film Transistors with a Self-Aligned Lightly Doped Drain Structure

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-01-30

著者

• Nunoshita M

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Kobayashi K

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• Nunoshita M

  Mitsubishi Electric Corp. Hyogo Jpn

• Nunoshita Masahiro

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Nunoshita Masahiro

  Semiconductor Research Laboratory Mitsubishi Electric Corporation

• NUNOSHITA Masahiro

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• Kamigaki K

  College Of Liberal Arts Toyama University

• KOBAYASHI Kazuhiro

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• MURAI Hiroyuki

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• SAKAMOTO Takao

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• BAERT Kris

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• TOKIOKA Hidetada

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• SUGAWARA Takashi

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• MATSUTANI Yuuichi

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• NAMIZAKI Hirofumi

  Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation

• Kudoh Kazuhide

  Department Of Applied Physics Tokyo University Of Science

• Kunihiro Kazuaki

  Optoelectronics And High Frequency Device Research Laboratories Nec Corporation

• Sakamoto Toshitugu

  Faculty Of Engineering Science Osaka University

• Baert Kris

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation : (present Address) In

• Murai Hiroyuki

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Shiokawa Takao

  Semiconductor Laboratory Riken The Institute For Physical And Chemical Research

• Sakamoto T

  Department Of Communication Engineering Faculty Of Computer Science And System Engineering Okayama P

• Sugawara T

  Central Research Institute Mitsubishi Materials Co. Ltd.

• Matsutani Yuuichi

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Namizaki Hirofumi

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Tokioka Hidetada

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Sugawara Takashi

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

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