Resolution of 1:1 Electron Stepper with Patterned Cold Cathode
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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Hongo Hiroo
Fundamental Research Laboratories Nec Caporation
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Hongo Hiroo
Fundamental Research Laboratories Nec Coporation
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OCHIAI Yukinori
Fundamental Res. Labs., NEC Corporation
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KAWAURA Hisao
Fundamental and Environmental Research Laboratories, NEC Corporation
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Ochiai Yukinori
Fundamental Research Laboratories Nec Caporation
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Kawaura Hisao
Fundamental Research Laboratories Nec Caporation
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