Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
スポンサーリンク
概要
- 論文の詳細を見る
Three-dimensional nanostructures on a glass capillary have a number of useful applications such as manipulators and sensors in the various microstructures. This time, we have demonstrated the fabrication of a nozzle nanostructure on a glass capillary for a bio injector by 30 keV Ga+ focused-ion-beam assisted deposition with a precursor of phenanthrene vapor and etching. It has been demonstrated that nozzle nanostructures with various shapes and sizes have been successfully fabricated. An inner tip diameter of 30 nm on a glass capillary and a tip shape with an inclined angle have been realized.
- 2003-06-15
著者
-
ISHIDA Masahiko
NEC Fundamental and Environmental Research Laboratories
-
OCHIAI Yukinori
NEC Fundamental and Environmental Research Laboratories
-
KOMETANI Reo
Himeji Institute of Technology, Graduate School of Science, LASTI
-
KANDA Kazuhiro
Himeji Institute of Technology, Graduate School of Science, LASTI
-
HARUYAMA Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI
-
MATSUI Shinji
Himeji Institute of Technology, Graduate School of Science, LASTI
-
MORITA Takahiko
Himeji Institute of Technology, Graduate School of Science, LASTI
-
KAITO Takashi
Seiko Instruments Inc.
-
FUJITA Junichi
NEC Fundamental Research Laboratories, NEC Corporation
-
WATANABE Keiichiro
Himeji Institute of Technology, Graduate School of Science, LASTI
-
Kanda Kazuhiro
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyougo 678-1205, Japan
-
Haruyama Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyougo 678-1205, Japan
-
Kometani Reo
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyougo 678-1205, Japan
-
Ochiai Yukinori
NEC Fundamental Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
-
Kaito Takashi
Seiko Instruments Inc., 36-1 Takenoshita, Oyama-cho, Sunto-gun, Shizuoka 410-1393, Japan
-
Morita Takahiko
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyougo 678-1205, Japan
-
Watanabe Keiichiro
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyougo 678-1205, Japan
-
Fujita Junichi
NEC Fundamental Research Laboratories
-
Fujita Junichi
NEC Fundamental Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
関連論文
- Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles
- Fabrication of Nanomanipulator with SiO_2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
- Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
- In-situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope
- Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
- Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,Microoptomechatronics)
- Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
- Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
- Characterization of Hard Diamond-Like Carbon Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
- Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
- Structure and Resonant Characteristics of Amorphous Carbon Pillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition
- Graphitized Wavy Traces of Iron Particles Observed in Amorphous Carbon Nano-pillars
- Room Temperature Nanoimprint Technology Using Hydrogen Silsequjoxane (HSQ)
- Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer
- Investigating Line-Edge Roughness in Calixarene Fine Patterns Using Fourier Analysis
- Giant Quantum Reflection of Neon Atoms from a Ridged Silicon Surface
- Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
- Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
- Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
- Graphitized Wavy Traces of Iron Particles Observed in Amorphous Carbon Nano-pillars