Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles

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We report the novel synthesis method of iron nanoparticles that can easily control both position and diameter significantly smaller than the lithography limit, and also demonstrate diameter- and position-controlled carbon nanotube (CNT) growth from the nanoparticles. We patterned iron particles having a $1.7 \pm 0.6$ nm diameter distribution within a positioning accuracy of $\pm 5$ nm by means of the “lithographically-anchored nanoparticle synthesis (LANS)” method. CNTs were grown by chemical vapor deposition using ethanol. A catalyst activity of ${\sim}10$% and a CNT diameter distribution of $1.3 \pm 0.4$ nm were obtained. Raman spectroscopy revealed the presence of single-walled CNTs.
2004-10-15