Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Three-dimensional diamond-like carbon (DLC) mold fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a precursor of phenanthrene has been applied to a nanoimprint process. Various 3D nanostructure DLC molds have been delineated by FIB-CVD using a computer-controlled pattern generator which is a commercially available pattern generator for electron beam lithography. Then, the molds were imprinted into hydrogen silsequioxane (HSQ) as a material replicated at room temperature. It was confirmed that the 3D mold, after nanoimprint lithography (NIL), kept its original shape, and 3D mold structures were successfully imprinted into HSQ. These results reveal that the 3D mold fabricated by FIB-CVD can be applied to NIL.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-06-15
著者
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ISHIDA Masahiko
NEC Fundamental and Environmental Research Laboratories
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OCHIAI Yukinori
NEC Fundamental and Environmental Research Laboratories
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Fujita Jun-ichi
Nec Fundamental Research Laboratories
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KOMETANI Reo
Himeji Institute of Technology, Graduate School of Science, LASTI
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KANDA Kazuhiro
Himeji Institute of Technology, Graduate School of Science, LASTI
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HARUYAMA Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI
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MATSUI Shinji
Himeji Institute of Technology, Graduate School of Science, LASTI
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MORITA Takahiko
Himeji Institute of Technology, Graduate School of Science, LASTI
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KAITO Takashi
Seiko Instruments Inc.
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WATANABE Keiichiro
Himeji Institute of Technology, Graduate School of Science, LASTI
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TAJIMA Tsutomu
Crestec Co.
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Kanda Kazuhiro
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Haruyama Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Ochiai Yukinori
NEC Fundamental Research Labs. 34 Miyukigaoka, Tsukuba, Ibaraki 305-8051, Japan
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Fujita Jun-ichi
NEC Fundamental Research Labs. 34 Miyukigaoka, Tsukuba, Ibaraki 305-8051, Japan
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Kaito Takashi
Seiko Instruments Inc. 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
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Ishida Masahiko
NEC Fundamental Research Labs. 34 Miyukigaoka, Tsukuba, Ibaraki 305-8051, Japan
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Morita Takahiko
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Keiichiro
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
関連論文
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