Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-30

著者

• ISHIDA Masahiko

  NEC Fundamental and Environmental Research Laboratories

• OCHIAI Yukinori

  NEC Fundamental and Environmental Research Laboratories

• Fujita Jun-ichi

  Nec Fundamental Research Laboratories

• Kometani Reo

  Univ. Tokyoi Tokyo Jpn

• KOMETANI Reo

  Himeji Institute of Technology, Graduate School of Science, LASTI

• KANDA Kazuhiro

  Himeji Institute of Technology, Graduate School of Science, LASTI

• HARUYAMA Yuichi

  Himeji Institute of Technology, Graduate School of Science, LASTI

• MATSUI Shinji

  Himeji Institute of Technology, Graduate School of Science, LASTI

• Morita Takahiko

  Crest-jst

• MORITA Takahiko

  Himeji Institute of Technology, Graduate School of Science, LASTI

• KAITO Takashi

  Seiko Instruments Inc.

• WATANABE Keiichiro

  Himeji Institute of Technology, Graduate School of Science, LASTI

• TAJIMA Tsutomu

  Crestec Co.

• Ichikawa Masakazu

  Joint Research Center For Atom Technology

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C

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• Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles
• E5 Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment(Other manufacturing-related technologies)
• Fabrication of Nanomanipulator with SiO_2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
• Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
• Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications(Micro/Nano Fabrication,Microoptomechatronics)
• Electron-Beam-Induced Selective Thermal Decomposition of Ultrathin SiO_2 Layers Used in Nanofabrication
• Polycrystalline Cu(InGa)Se_2 Thin-Film Solar Cells with ZnSe Buffer Layers
• In-situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope
• Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
• Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,Microoptomechatronics)
• Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars
• Growth Manner and Mechanical Characteristics of Amorphous Carbon Nanopillars Grown by Electron-Beam-Induced Chemical Vapor Deposition
• Position-Controlled Carbon Fiber Growth Catalyzed Using Electron Beam-Induced Chemical Vapor Deposition Ferrocene Nanopillars
• Nanomechanical Switch formed by Focused-Ion-Beam Chemical Vapor Deposition
• Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
• Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
• Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
• Characterization of Hard Diamond-Like Carbon Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
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• Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
• Structure and Resonant Characteristics of Amorphous Carbon Pillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition
• Spectral Characteristics of Thin-Film Stacked-Tandem Solar Modules
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• Observation and nucleation control of Ge nanoislands on Si(111) surfaces using scanning reflection electron microscopy
• Layer-by-Layer Oxidation of Si(001) Surfaces
• High Deposition Rate of Polycrystalline Silicon Thin Films Prepared by Hot Wire Cell Method
• Electrical Characterization of Atomic-Scale Defects in an Ultrathin Si Oxynitride Layer
• A Fabrication of Very Low Contact Resistance AIGaN/GaN Heterojunction Field-Effect Transistor Using Selective Area Growth Technique by Gas-Source Molecular Beam Epitaxy : Optics and Quantum Electronics
• High-Temperature MBE Growth of Si-Direct Current Heating Effects on (111) and (001) Vicinal Surfaces
• Diffusion Constants of Si Adsorbates on a Si(001) Surface
• Observation of Si(001) Surface Domains in Absorption Current Images of an Electron Microscope
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• Room Temperature Nanoimprint Technology Using Hydrogen Silsequjoxane (HSQ)
• Anisotropic Diffusion of Si Adsorbates on a Si (001) Surface
• Direct Observation of Electron Charge of Si Atoms on a Si(001) Surface
• Reflective Double Slit Atom Interferometer
• Reflective Double Slit Atom Interferometer
• Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer
• Scanning Tunneling Microscopy Study of Hf Silicate Formed by Ulttrathin Hf Metal on SiO_2 : Effect of Hf/SiO_2 Thickness Ratio
• Evaluation of fluorinated diamond like carbon as antisticking layer by scanning probe microscopy
• Sub-10-nm-Scale Lithography Using p-chloromethyl-methoxy-calix[4]arene Resist
• Investigating Line-Edge Roughness in Calixarene Fine Patterns Using Fourier Analysis
• Mechanism of Layer-by-Layer Oxidation of Si(001)Surfaces by Two-Dimensional Oxide-Island Nucleation at SiO_2/Si Interfaces
• Mechanism of Layer-by-Layer Oxidation of Si (001) Surfaces Proceeding by Two-Dimensional Oxide-Island Nucleation at SiO_2/Si Interfaces
• Giant Quantum Reflection of Neon Atoms from a Ridged Silicon Surface
• Electrical Characterization of Atomic-Scale Defects in an Ultrathin Si Oxynitride Layer
• Atomic-Scale Structure of SiO_2/Si(001) Interface Formed by Furnace Oxidation
• Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
• Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
• Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles
• Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
• Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
• Graphitized Wavy Traces of Iron Particles Observed in Amorphous Carbon Nano-pillars
• Electron-beam Initiated Transfer of Ge from Ge Islands on SiO2 Surfaces to the Tip of a Scanning Tunneling Microscope

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