Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications(Micro/Nano Fabrication,<Special Section>Microoptomechatronics)

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Three-dimensional nanostructure fabrication has been demonstrated by 30keV Ga^+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C_<14>H_<10>) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75μm external diameter and 12μm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nanospace-wiring with 0.1μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
社団法人電子情報通信学会の論文
2007-01-01