Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
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概要
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Fluorinated diamond-like carbon (F-DLC) has recently been applied as an antisticking layer on nanoimprint molds for semipermanent use, replacing the self-assembled monolayer currently used. An SiO2/Si mold was successfully coated with an F-DLC thin layer by chemical vapor deposition (CVD). The measured water contact angle of the F-DLC surface was 103°, which is 30° higher than that of the DLC surface. This value indicates the adequacy of F-DLC as an antisticking layer. Moreover, an F-DLC film had a high hardness of 24 GPa, similar to that of a DLC film (26 GPa). AZ resist patterns of 150 nm linewidth and 350 nm pitch were successfully obtained by thermal nanoimprinting using an F-DLC-coated mold. Finally, after repeating the imprinting for more than 100 times, the initial water contact angle of 103° for the surface of the F-DLC-coated mold was maintained.
- 2006-09-25
著者
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Kanda Kazuhiro
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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NAKAMATSU Ken-ichiro
Graduate School of Science, LASTI, Himeji Institute of Technology
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Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Yamada Noriko
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Haruyama Yuichi
Graduate School of Science, University of Hyogo, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Nakamatsu Ken-ichiro
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
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Yamada Noriko
Graduate School of Science, University of Hyogo, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kanda Kazuhiro
Graduate School of Science, University of Hyogo, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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