Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
スポンサーリンク
概要
- 論文の詳細を見る
Ladder hydrogen silsesquioxane (HSQ) has been proposed as a replication material to be used in nanoimprinting processes at room temperature. We replicated ladder-HSQ patterns by nanoimprinting at room temperature that were as accurate as replicated caged-HSQ patterns. Caged HSQ is the standard replication material currently used in nanoimprinting at room temperature. Caged-HSQ-imprinted patterns completely disappeared when annealed at 300 °C. However, ladder-HSQ-imprinted patterns retained almost the same rectangular profile as they had before annealing, even after being subject to high-temperature annealing at 1000 °C. Fourier transform infrared spectroscopy showed that high-temperature annealing transformed the HSQ into a SiOx structure. This vitrification of HSQ resin improved its dry-etching durability, with the dry-etching rate when subject to CHF3 reactive-ion etching decreasing from 32 to 27 nm/min, which is close to the value of 26 nm/min for thermally grown SiO2 and a quartz substrate.
- 2007-08-15
著者
-
NAKAMATSU Ken-ichiro
Graduate School of Science, LASTI, Himeji Institute of Technology
-
Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Taneichi Noriaki
Tokyo Ohka Kogyo Co. Ltd.
-
Taneichi Noriaki
Tokyo Ohka Kogyo Co., Ltd., Kawasaki 211-0012, Japan
-
Ishikawa Kiyoshi
Tokyo Ohka Kogyo Co., Ltd., Kawasaki 211-0012, Japan
-
Nakamatsu Ken-ichiro
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
関連論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications(Micro/Nano Fabrication,Microoptomechatronics)
- Photoemission study of the Au-SrTiO3(100) surface (特集 量子ビームによるナノバイオ科学と基盤技術)
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface
- Effect of UV Irradiation on Microlens Arrays Fabricated by Room Temperature Nanoimprinting Using Organic Spin-on-Glass
- Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
- Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,Microoptomechatronics)
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
- H205 EVALUATION OF RELATIVE VELOCITY BETWEEN SINGLE BUBBLES AND LIQUID IN HORIZONTAL TURBULENT PIPE FLOW(Bubble behavior)
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Photoelectron Spectroscopy Study of the Valence Band Region in Diamond-Like Carbon Thin Films
- Control of the Molecularly Reoriented Direction in Surface Relief Holographic Gratings Using Photoreactive Liquid Crystalline Copolymers
- Thermal Nanoimprinting on Prealigned Photoreactive Polymer Liquid Crystal for Molecular Reorientation
- Surface Relief Formation in Photo-Cross-Linkable Polymer/Benzophenone Composite Films Using 325 nm Laser
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition
- Relationship between Field Emission Properties and Material Characteristics of Diamond-Like Carbon Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
- Evaluation of a Bio Nano-Sensing Probe Fabricated by Focused-Ion-Beam Chemical Vapor Deposition for Single Organelle Analyses
- X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
- Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Photoemission Study of Hydrogenated Amorphous Carbon Thin Films as a Function of Annealing Temperature
- Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon
- Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface