X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition

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概要

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• The coordination of C atoms in diamond-like carbon (DLC) thin films formed by Ar gas cluster ion beam (GCIB) assisted deposition using fullerene as a carbon source was investigated using X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. From the curve fitting analysis of XPS spectra of the C 1s core level, the absolute sp2 and sp3 contents in the DLC films formed by Ar GCIB-assisted deposition were evaluated for the first time. The absolute sp3 content of DLC films formed by the GCIB-assisted deposition at an acceleration voltage of 5 kV was the highest compared with that formed at 7 and 9 kV. In addition, the absolute sp2 contents evaluated from XPS spectra were compared to the relative sp2 contents evaluated from NEXAFS spectra.

• 2008-05-25

著者

• Kanda Kazuhiro

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• Haruyama Yuichi

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• Matsui Shinji

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• Kanda Kazuhiro

  Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan

• Yamada Isao

  Graduate School of Engineering, University of Hyogo, 2167 Syosya, Himeji, Hyogo 671-2201, Japan

• Kitagawa Teruyuki

  Nomura Plating Co., Ltd., Nishiyodogawa, Osaka 555-0033, Japan

• Toyoda Noriaki

  Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan

• Gejo Tatsuo

  Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan

• Toyoda Noriaki

  Graduate School of Engineering, University of Hyogo, 2167 Syosya, Himeji, Hyogo 671-2201, Japan

• Yamada Isao

  Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan

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