Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon

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The annealing effect on the local structure of diamond-like carbon (DLC) formed by Ga+ focused-ion-beam chemical vapor deposition (FIB-CVD) was investigated by the incidence angle-dependent measurement of the C K-edge near edge X-ray absorption fine structure (NEXAFS) from 0 to 60°. The peak intensity corresponding to the resonance transition of $\text{1s} \rightarrow \sigma^{*}$ originating from carbon–gallium bonding markedly increased with incidence angle in the spectra of a FIB-CVD DLC film annealed at 400 °C. This angle dependency was attributable to the movement of residual Ga atoms from the bottom to the neighboring surface of the FIB-CVD DLC film.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2007-11-15