Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold
スポンサーリンク
概要
- 論文の詳細を見る
The surface property of fluorinated diamond-like carbon (F-DLC) thin film, which is expected to be a new antisticking layer of nanoimprint mold, was evaluated with reference to the commercial diamond-like carbon (DLC) thin film formed by radio-frequency (RF) plasma chemical vapor deposition (CVD) and the fluorinated self-assembled monolayer (SAM). From the measurement of X-ray photoelectron spectrum (XPS), the surface of the F-DLC thin film was found to be overspread with hydrophobic CFx components. In addition, the durability of the F-DLC thin film was evaluated by the contact angle measurement of a water drop against repeating times of the thermal imprint process. After over 100 times of imprinting, the contact angles of the F-DLC thin film were almost kept constant with the initial value and a fine replicated pattern was obtained. From these results, the F-DLC thin film was found to be suitable as a novel antisticking layer of the thermal nanoimprint mold.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2007-09-30
著者
-
Kanda Kazuhiro
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Yamada Noriko
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Nakamatsu Ken-ichiro
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
-
Nakamatsu Ken-ichiro
Graduate School of Science, LASTI, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
-
Kanda Kazuhiro
Graduate School of Science, LASTI, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
関連論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications(Micro/Nano Fabrication,Microoptomechatronics)
- Photoemission study of the Au-SrTiO3(100) surface (特集 量子ビームによるナノバイオ科学と基盤技術)
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface
- Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
- Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,Microoptomechatronics)
- Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- H205 EVALUATION OF RELATIVE VELOCITY BETWEEN SINGLE BUBBLES AND LIQUID IN HORIZONTAL TURBULENT PIPE FLOW(Bubble behavior)
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Photoelectron Spectroscopy Study of the Valence Band Region in Diamond-Like Carbon Thin Films
- Control of the Molecularly Reoriented Direction in Surface Relief Holographic Gratings Using Photoreactive Liquid Crystalline Copolymers
- Thermal Nanoimprinting on Prealigned Photoreactive Polymer Liquid Crystal for Molecular Reorientation
- Surface Relief Formation in Photo-Cross-Linkable Polymer/Benzophenone Composite Films Using 325 nm Laser
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition
- Relationship between Field Emission Properties and Material Characteristics of Diamond-Like Carbon Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
- Evaluation of a Bio Nano-Sensing Probe Fabricated by Focused-Ion-Beam Chemical Vapor Deposition for Single Organelle Analyses
- X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
- Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Photoemission Study of Hydrogenated Amorphous Carbon Thin Films as a Function of Annealing Temperature
- Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon
- Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface