Photoemission Study of Hydrogenated Amorphous Carbon Thin Films as a Function of Annealing Temperature
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概要
- 論文の詳細を見る
The electronic structure in hydrogenated amorphous carbon (a-C:H) thin films as a function of annealing temperature was investigated by photoemission spectroscopy. The photoemission results of the valence band and the C 1s core level suggested that the graphitization of a-C:H films proceeds by annealing at more than 400 °C. From the photoemission spectra of the C 1s core level, the coordination of C atoms in a-C:H films was evaluated as a function of annealing temperature. On the basis of the evaluations, the electronic structure of a-C:H films as a function of annealing temperature is discussed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-05-25
著者
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Tagawa Masahito
Graduate School Of Engineering Kobe University
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Yokota Kumiko
Graduate School Of Engineering Kobe University
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Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Haruyama Yuichi
Graduate School of Science, and Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Yokota Kumiko
Graduate School of Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan
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