Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-06-25
著者
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Teraoka Yuden
Japan Atomic Energy Agency
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Teraoka Yuden
Japan Atomic Energy Agency Hyogo Jpn
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TAGAWA Masahito
Graduate School of Engineering, Kobe University
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YOKOTA Kumiko
Graduate School of Engineering, Kobe University
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MAEDA Ken-ichi
Graduate School of Engineering, Kobe University
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YOSHIGOE Akitaka
Japan Atomic Energy Agency
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Tagawa Masahito
Graduate School Of Engineering Kobe University
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Yokota Kumiko
Graduate School Of Engineering Kobe University
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Maeda Ken-ichi
Graduate School Of Engineering Kobe University
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- Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam
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