Synchrotron Radiation Photoelectron Emission Study of SiO2 Film Formed by Hyperthermal O-Atom Beam at Room Temperature
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概要
- 論文の詳細を見る
An ultrathin SiO2 overlayer on a Si(001) surface formed by a 5 eV O-atom beam at room temperature was analyzed by synchrotron radiation photoelectron spectroscopy (SR-PES). SR-PES spectra clearly indicated that the SiO2 layer formed by a hyperthermal O-atom beam at room temperature contains a small amount of suboxides compared with that formed by high-temperature oxidation in O2 atmosphere. Quantitative analysis suggests that the thickness of the structural transformation layer was less than a monolayer and the amount of suboxides was independent of the film thickness. The translational energy dependence of SR-PES spectra suggests that the reaction probability with a Si-atom increases with the translational energy of the O atoms in the range between 1 to 5 eV. The role of inverse diffusion of interstitial Si atoms in the kinetics of hyperthermal O-atom-beam oxidation is suggested.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-12-15
著者
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Teraoka Yuden
Japan Atomic Energy Agency
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YOSHIGOE Akitaka
Japan Atomic Energy Agency
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Tagawa Masahito
Department Of Mechanical Engineering Faculty Of Engineering Kobe University
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Yokota Kumiko
Department Of Mechanical Engineering Faculty Of Engineering Kobe University
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Sogo Chie
Department Of Mechanical Engineering Faculty Of Engineering Kobe University
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Hachiue Syunsuke
Department Of Mechanical Engineering Faculty Of Engineering Kobe University
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Teraoka Yuden
Japan Atomic Energy Agency, 1-1-1 Koto, Mikazuki-cho, Sayo, Hyogo 679-5148, Japan
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Tagawa Masahito
Department of Mechanical Engineering, Faculty of Engineering, Kobe University, 1-1 Rokko-dai, Nada, Kobe 657-8501, Japan
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Yoshigoe Akitaka
Japan Atomic Energy Agency, 1-1-1 Koto, Mikazuki-cho, Sayo, Hyogo 679-5148, Japan
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Sogo Chie
Department of Mechanical Engineering, Faculty of Engineering, Kobe University, 1-1 Rokko-dai, Nada, Kobe 657-8501, Japan
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Hachiue Syunsuke
Department of Mechanical Engineering, Faculty of Engineering, Kobe University, 1-1 Rokko-dai, Nada, Kobe 657-8501, Japan
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Yokota Kumiko
Department of Mechanical Engineering, Faculty of Engineering, Kobe University, 1-1 Rokko-dai, Nada, Kobe 657-8501, Japan
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