Real-Time Observation of Initial Thermal Oxidation on Si(110)-$16\times 2$ Surfaces by O 1s Photoemission Spectroscopy Using Synchrotron Radiation
スポンサーリンク
概要
- 論文の詳細を見る
The initial oxidation on a Si(110)-$16\times 2$ surface at room temperature and 540 °C has been investigated by real-time X-ray photoemission spectroscopy (O 1s) using 687 eV photons. At both temperatures, the initial oxidation of Si(110) is characterized by its unique rapid oxidation regime immediately after the introduction of oxygen molecules. O 1s spectra are shown to consist of at least four oxidation states. It is likely that oxidation at or around the adatoms of pentagon pairs, reportedly present on the Si(110)-$16\times 2$ reconstructed surface, is the predominant process in the very early stage of oxidation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-04-30
著者
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Teraoka Yuden
Japan Atomic Energy Agency
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YOSHIGOE Akitaka
Japan Atomic Energy Agency
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NARITA Yuzuru
Kyushu Institute of Technology
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Togashi Hideaki
Center For Interdisciplinary Research Tohoku University
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Suemitsu Maki
Center For Interdisciplinary Research Tohoku University
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Konno Atsushi
Center For Interdisciplinary Research Tohoku University
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ENTA Yoshiharu
Department of Physics, Faculty of Science, Tohoku University
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Yamamoto Yoshihisa
Center For Interdisciplinary Research Tohoku University
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Kato Atsushi
Center For Interdisciplinary Research Tohoku University
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Teraoka Yuden
Japan Atomic Energy Agency, 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5148, Japan
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Yoshigoe Akitaka
Japan Atomic Energy Agency, 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5148, Japan
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Enta Yoshiharu
Department of Materials Science and Technology, Faculty of Science and Technology, Hirosaki University, 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, Japan
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Togashi Hideaki
Center for Interdisciplinary Research, Tohoku University, 6-3 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8578, Japan
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Konno Atsushi
Center for Interdisciplinary Research, Tohoku University, 6-3 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8578, Japan
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