Thin-Film Deposition of Silicon-Incorporated Diamond-Like Carbon by Plasma-Enhanced Chemical Vapor Deposition Using Monomethylsilane as a Silicon Source
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概要
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We have deposited Si-incorporated diamond-like carbon (DLC) films by radio-frequency plasma-enhanced chemical vapor deposition using methane, argon, and monomethylsilane (MMS; CH3SiH3) as a silicon source, and have investigated the structural and mechanical properties of the films. The deposition rate and Si atomic fraction [$\text{Si}/(\text{Si}+\text{C})$] in the DLC films increased with increasing MMS flow ratio. The Si fraction was approximately 13% at a MMS flow ratio [$\text{MMS}/(\text{MMS}+\text{CH$_{4}$})$] of 3%, showing that the deposition using a combination of CH4 and MMS produces films with high Si content compared with those deposited using conventional C and Si sources. The Si fraction was also found to increase with a decrease in Ar flow rate under a constant MMS flow ratio. Many particles composed mainly of Si, whose size was 0.3–1 μm in diameter, were observed on the surface when deposition was carried out at MMS flow ratios of 15 and 30%. Compressive internal stress in the films decreased with the MMS flow ratio and/or with the Ar flow rate. The decrease in internal stress is probably due to the relaxation of a three-dimensional rigid network by the formation of Si–C and Si–H bonds in the films as well as Ar+ ion bombardment.
- 2008-11-25
著者
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Endoh Tetsuo
Research Institute Of Electrical Communication Tohoku University
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Suemitsu Maki
Center For Interdisciplinary Research Tohoku University
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Konno Atsushi
Center For Interdisciplinary Research Tohoku University
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Enta Yoshiharu
Faculty Of Science And Technology Hirosaki University
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Nakazawa Hideki
Faculty Of Science And Technology Hirosaki University
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Abe Toshimi
Tohoku Institute Of Technology
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Yasui Kanji
Nagaoka Univ. Technol. Nagaoka‐shi Jpn
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Itoh Takashi
Center For Information And Sciences Nippon Medical School
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Kinoshita Takeshi
Faculty Of Engineering Yamaguchi University
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Suemitsu Maki
Center of Interdisciplinary Research, Tohoku University, Sendai 980-8578, Japan
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Asai Yuhki
Faculty of Science and Technology, Hirosaki University, Hirosaki, Aomori 036-8561, Japan
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Mashita Masao
Faculty of Science and Technology, Hirosaki University, Hirosaki, Aomori 036-8561, Japan
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Narita Yuzuru
Kyusyu Institute of Technology, Kitakyusyu 804-8550, Japan
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Narita Yuzuru
Kyusyu Institute of Technology, Kitakyushu 804-8550, Japan
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Enta Yoshiharu
Faculty of Science and Technology, Hirosaki University, Hirosaki, Aomori 036-8561, Japan
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Konno Atsushi
Center of Interdisciplinary Research, Tohoku University, Sendai 980-8578, Japan
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Mashita Masao
Faculty of Science and Technology, Hirosaki University
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