Structure, Chemical Bonding and These Thermal Stabilities of Diamond-Like Carbon (DLC) Films by RF Magnetron Sputtering

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概要

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• We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and sp2 bonds indicates that the DLC films have high thermal stabilities.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2003-06-15

著者

• Suemitsu Maki

  Research Institute Of Electrical Communication Tohoku University

• Enta Yoshiharu

  Faculty Of Science And Technology Hirosaki University

• MASHITA Masao

  Faculty of Science and Technology,Hirosaki University

• NAKAZAWA Hideki

  Faculty of Science and Technology,Hirosaki University

• Nakazawa H

  Aoyama Gakuin Univ. Kanagawa Jpn

• Nakazawa Hideki

  Faculty Of Science And Technology Hirosaki University

• Mikami Takamasa

  Faculty of Science and Technology, Hirosaki University, 3 Bunkyo-cho, Hirosaki 036-8561, Japan

• Mikami Takamasa

  Faculty Of Science And Technology Hirosaki University

• Mashita Masao

  Faculty of Science and Technology, Hirosaki University, Hirosaki, Aomori 036-8561, Japan

• Suemitsu Maki

  Research Institute of Electrical Communication (RIEC), Tohoku University, Sendai 980-8577, Japan

• Mashita Masao

  Faculty of Science and Technology, Hirosaki University

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