Epitaxy of Graphene on 3C-SiC(111) Thin Films on Microfabricated Si(111) Substrates
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概要
- 論文の詳細を見る
The epitaxy of graphene on 3C-SiC(111) formed on microfabricated Si(111) has been demonstrated. Through observations by optical microscopy, micro-Raman spectroscopy, low-energy electron diffraction, and photoelectron spectroscopy, it has been confirmed that the epitaxial graphene is Bernal-stacked with a buffer layer present between graphene and the 3C-SiC film, which can lead to the opening of the band gap necessary for logic operations. The quality of graphene is improved by the shrinkage of the pattern. These results indicate that graphene on silicon using the microfabricated substrate is a promising material for the realization of graphene-based devices.
- 2012-06-25
著者
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Teraoka Yuden
Japan Atomic Energy Agency
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YOSHIGOE Akitaka
Japan Atomic Energy Agency
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Kawai Yusuke
Graduate School Of Engineering Tohoku University
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Kinoshita Toyohiko
Jasri Spring-8
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Suemitsu Maki
Research Institute Of Electrical Communication Tohoku University
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Fukidome Hirokazu
Research Center For Photoenergetics Of Organic Materials Osaka University
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Enta Yoshiharu
Graduate School Of Science And Technology Hirosaki University
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Kotsugi Masato
Jasri Hyogo Jpn
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Handa Hiroyuki
Research Institute of Electrical Communication, Tohoku University, Sendai 980-8577, Japan
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Handa Hiroyuki
Research Institute of Electrical Communications, Tohoku University, Sendai 980-8577, Japan
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Ide Takayuki
Research Institute of Electrical Communications, Tohoku University, Sendai 980-8577, Japan
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Ohkochi Takuo
JASRI/SPring-8, Sayo, Hyogo 679-5148, Japan
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Suemitsu Maki
Research Institute of Electrical Communications, Tohoku University, Sendai 980-8577, Japan
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Fukidome Hirokazu
Research Institute of Electrical Communications, Tohoku University, Sendai 980-8577, Japan
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Kinoshita Toyohiko
JASRI/SPring-8, Sayo, Hyogo 679-5148, Japan
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Kotsugi Masato
JASRI/SPring-8, Sayo, Hyogo 679-5148, Japan
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Suemitsu Maki
Research Institute of Electrical Communication (RIEC), Tohoku University, Sendai 980-8577, Japan
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Handa Hiroyuki
Research Institute of Electrical Communication (RIEC), Tohoku University, Sendai 980-8577, Japan
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