Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges
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概要
- 論文の詳細を見る
- 2012-11-01
著者
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Kawai Yusuke
Graduate school of Engineering, Tohoku University
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Kawai Yusuke
Graduate School Of Engineering Tohoku University
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Hashida Toshiyuki
Fracture And Reliability Res. Inst. Graduate School Of Engineering Tohoku Univ.
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Ono Takahito
Graduate School Of Eng. Tohoku University
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Omori Mamoru
Fracture And Reliability Research Institute Tohoku University
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HE Liang
Graduate School of Engineering, Tohoku University
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TODA Masaya
Microsystem Integration Center, Tohoku University
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SARBI Mohd
Faculty of Engineering, University of Malaya
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HASHIDA Toshiyuki
Fracture and Reliability Research Institute, Tohoku University
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