Pattern Transfer of Self-Ordered Structure with Diamond Mold
スポンサーリンク
概要
- 論文の詳細を見る
A diamond mold patterned into self-ordered honeycomb structures was fabricated and pattern transfer was demonstrated with this mold. A diamond film was deposited onto a silicon substrate by hot-filament chemical vapor deposition and bonded with Pyrex glass by an anodic bonding technique. By removing the silicon substrate, the diamond film with a flat surface was formed on the Pyrex glass. The high aspect ratio of the pattern with 100 nm-pitch honeycomb structures was formed on the diamond thin film by a fast-atom beam of oxygen using an ordered porous alumina film as a mask. A dot pattern was transferred onto a polymethylmethacrylate (PMMA) film by an imprinting technique.
- 2003-06-15
著者
-
Ono Takahito
Graduate School Of Eng. Tohoku University
-
Konoma Chihiro
Graduate School Of Engineering Tohoku University
-
Miyashita Hidetoshi
Graduate School Of Engineering Tohoku University
-
Kanamori Yoshiaki
Graduate School Of Engineering Tohoku University
-
Esashi Masayoshi
New Industry Creation Hatchery Center (niche) Tohoku University
-
Miyashita Hidetoshi
Graduate School of Engineering, Tohoku University, Aza Aoba 01, Aramaki Aoba-ku, Sendai 980-8579, Japan
-
Konoma Chihiro
Graduate School of Engineering, Tohoku University, Aza Aoba 01, Aramaki Aoba-ku, Sendai 980-8579, Japan
-
Ono Takahito
Graduate School of Engineering, Tohoku University, Aza Aoba 01, Aramaki Aoba-ku, Sendai 980-8579, Japan
関連論文
- Bach Fabrication of Microlens at the end of Optical Fiber using Self-photolithgraphy and Etching Techniques
- Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator
- Application of Screen-Printed Catalytic E1ectrodes to MEMS-Based Fuel Cells (特集:燃料電池を支えるMEMS/NEMS技術)
- Micro Wishbone Interferometer for Miniature FTIR Spectrometer
- Carbon Nanotube on a Si Tip for Electron Field Emitter : Instrumentation, Measurement, and Fabrication Technology
- Microfabrication of 10nm Aperture on Si cantilever for near field optical microscopy
- Noise-Enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator
- Micro-Nano Electro Mechanical Systems
- Micro Industry Equipments(Micro Mechanical Engineering)
- A24-041 MICRO INDUSTRY EQUIPMENTS
- Vertical Diaphragm Electrostatic Actuator for a High Density Ink Jet Printer Head
- 504 Crystallographic orientations and thermal treatments influences on nanomechanics of ultra-thin single crystal silicon (SCS) resonators for ultimate sensing
- Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum
- MEMS-Based Solid Propellant Rocket Array Thruster with Electrical Feedthroughs
- RF-Plasma-Assisted Fast Atom Beam Etching
- Synchronized mechanical elements for resonance sensing application
- OS6(3)-11(OS06W0429) Micro-Nano Electromechanical Systems by Silicon Bulk-Micromachining
- Resonant Silicon Mass Sensor with Capacitive Readout
- Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
- Pattern Transfer of Self-Ordered Structure with Diamond Mold
- Electron Emission from Indium Tin Oxide/Silicon Monoxide/Gold Structure
- シリコン骨格の能動カテーテル
- Position-Controlled Vertical Growths of Individual Carbon Nanotubes Using a Cage-Shaped Protein
- B13-117 SPECTRAL CONTROL OF THERMAL RADIATION BY TWO-DIMENSIONAL SURFACE GRATING STRUCTURES
- Wide-Angle Antireflection Effect of Subwavelength Structures for Solar Cells
- Nano-Probe Sensing and Multi-Probe Data Storage
- Nanomechanical Structure with Integrated Carbon Nanotube
- MEMS-Based Fuel Reformer with Suspended Membrane Structure
- Bimorph Cantilevers Actuated by Focused Laser from the Side
- Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
- Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures
- Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics
- Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges
- High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package using a Lightly-doped Silicon Chip Carrier
- Vacuum test of a micro-solid propellant rocket array thruster