504 Crystallographic orientations and thermal treatments influences on nanomechanics of ultra-thin single crystal silicon (SCS) resonators for ultimate sensing

概要

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Miniaturization of mechanical components is the simplest method to minimize thermo-mechanical noise in various kinds of resonating sensors and Nano-electromechanical System (NEMSs). As the dimensions of a structure shrink, surface effects tend to dominate the bulk properties in mechanical quality factors (Q-factors). In this study, the influence of crystallographic orientations on nanomechanical properties of 50-nm-thick(100)-oriented single crystaline silicon resonators was investigated by examining the effects of surface treatments, such as flash-heating on the mechanical quality factors (Q-factors) and resonant frequencies. This study also presents findings on nanomechanical properties of ultra-thin single crystal silicon (SCS) resonators, with emphasis on their surface effects, resulting from thermal treatments. The results obtained in this study provide an insight to the understanding of nanomechanics of resonating elements, and provide further proof that thermal treatments is an effective method to achieve higher Q-factors for future's nanoengineered devices for ultimate sensing.
一般社団法人日本機械学会の論文
2009-08-25