503 硬質膜のパターニング技術を用いた磁性材料のマイクロファブリケーション(OS8-(1) 精密微細加工と評価,オーガナイズドセッション)

概要

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Micromachining of magnetic materials is becoming a crucial technology for future magnetic systems/devices such as magnetic quantum devices, micro energy generators, and micro-magnetic smart systems, etc. NiFe alloy, one of the typical ferromagnetic materials, can be deposited and fabricated using current thin film and micromachining technologies, and has found various applications in microsensors, microactuators, and microsystems. In our previous work, Ni_<45>Fe_<55> alloy with the highest saturation magnetic-flux density was selected as the micro-magnet for all-silicon quantum computer. This work however, reports the preliminary results of micro fabrication of Ni_<45>Fe_<55> alloy structure by pattern transfer of SiO_2 through DC opposite target sputtering.
一般社団法人日本機械学会の論文
2009-08-25