Magnetic Torque Driving 2D Micro Scanner with a Non-Resonant Large Scan Angle
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概要
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In this paper, a non-resonant 2D micro optical scanner with extremely large optical scan angle has been reported for wide field of view in a LASER application. Two pairs of permanent magnets are mounted on the Si mirror and supporting gimbal structure, respectively, to generate large tilting angle without a thermal degradation of the driving property. The scanner can be driven in two- axis independently by a rotational magnetic torque using orthogonal oriented external electromagnets. The maximum optical scan-angle of 118 degree has been achieved with applying 120mA to the electromagnet.
著者
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Esashi Masayoshi
The World Premier International Research Center Initiative for Atom Molecule Materials, Tohoku Unive
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Makishi Wataru
Graduate school of Engineering, Tohoku University
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Kawai Yusuke
Graduate school of Engineering, Tohoku University
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