Micro Wishbone Interferometer for Miniature FTIR Spectrometer
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概要
- 論文の詳細を見る
“Wishbone” type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1.
著者
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Esashi Masayoshi
The World Premier International Research Center Initiative for Atom Molecule Materials, Tohoku Unive
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Lee Young-min
Graduate School of Engineering, Tohoku University
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Toda Masaya
Graduate School of Engineering, Tohoku University
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Ono Takahito
Graduate School of Engineering, Tohoku University
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