Fabrication of Anti-Corrosive Capacitive Vacuum Sensors with a Silicon Carbide/Polysilicon Bi-Layer Diaphragm and Electrical Through-Hole Connections on the Opposite Side
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概要
- 論文の詳細を見る
This paper reports a capacitive vacuum sensor with a bi-layer diaphragm made of silicon carbide (SiC) and polysilicon for uses in corrosive environments like etchers. The diaphragm side is completely covered with SiC to avoid corrosion, and electrical contacts are placed on the opposite side for easy packaging. This vacuum sensor design was realized with a sealing of the pressure reference room achieved by Au-Si eutectic bonding. In spite of incomplete sealing of the pressure reference room, the fabricated vacuum sensor was evaluated using a laser Doppler meter and an impedance analyzer.
- 社団法人 電気学会の論文
- 2008-08-01
著者
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Esashi Masayoshi
The World Premier International Research Center Initiative for Atom Molecule Materials, Tohoku Unive
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TANAKA Shuji
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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Esashi Masayoshi
The World Premier International Res. Center Initiative For Atom Molecule Materials Tohoku Univ.
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Esashi Masayoshi
The World Premier International Research Center Initiative For Atom Molecule Materials Tohoku Univer
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LARANGOT Benoit
Department of Nanomechanics, Tohoku University
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Tanaka Shuji
Department Of Nanomechanics Tohoku University
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Larangot Benoit
Department Of Nanomechanics Tohoku University
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Tanaka Shuji
Department Of Information Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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Tanaka Shuji
Department Of Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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Tanaka Shuji
Department of Electronic Materials Engineering, Fukuoka Institute of Technology,
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TANAKA Shuji
Department of Chemistry, Faculty of Science, Kyushu University
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