Sputter Deposited Zinc Oxide Photoconductive Antenna on Silicon Substrate for Sub-Terahertz Time-Domain Spectroscopy
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概要
- 論文の詳細を見る
In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6×104Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.
- 社団法人 電気学会の論文
- 2007-11-01
著者
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Ono Takahito
Department of Mechanical System and Design, Graduate School of Engineering, Tohoku University
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岩見 健太郎
東京農工大学
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IWAMI Kentaro
Department of mechanical systems engineering, graduate school of engineering, Tokyo University of Ag
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ESASHI Masayoshi
Micro-Nano Center, Tohoku University
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Iwami Kentaro
Tokyo Univ. Of Agri. & Tech.
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Iwami Kentaro
Department Of Mechanical Systems Engineering Graduate School Of Engineering Tokyo University Of Agri
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Esashi Masayoshi
The World Premier International Res. Center Initiative For Atom Molecule Materials Tohoku Univ.
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Ono Takahito
Department Of Mechanical System And Design Graduate School Of Engineering Tohoku University
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Ono Takahito
Dep. Of Mechanical System And Design Graduate School Of Engineering Tohoku Univ.
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Esashi Masayoshi
Micro Nanomachining Research And Education Center Graduate School Of Engineering Tohoku University
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Ono Takahito
Department Of Nanomechanics Tohoku University
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岩見 健太郎
Division Of Advanced Mechanical Systems Engineering Tokyo University Of Agriculture And Technology
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Iwami Kentaro
Department of Mechanical System Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan
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