Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures
スポンサーリンク
概要
- 論文の詳細を見る
Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a “soft” supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the “soft” supporting plate.
- The Institute of Electrical Engineers of Japanの論文
- 2011-05-01
著者
-
Esashi Masayoshi
The World Premier International Res. Center Initiative For Atom Molecule Materials Tohoku Univ.
-
Ono Takahito
Graduate School Of Eng. Tohoku University
-
Ono Takahito
Dep. Of Mechanical System And Design Graduate School Of Engineering Tohoku Univ.
-
Jiang Yonggang
Japan Science And Technology Agency
関連論文
- A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
- Electrostatically Switchable Microprobe for Mass-Analysis Scanning Force Microscopy
- Bach Fabrication of Microlens at the end of Optical Fiber using Self-photolithgraphy and Etching Techniques
- Magnetic Torque Driving 2D Micro Scanner with a Non-Resonant Large Scan Angle
- Sputter Deposited Zinc Oxide Photoconductive Antenna on Silicon Substrate for Sub-Terahertz Time-Domain Spectroscopy
- Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Piezoelectric Resonator for Intravascular Ultrasonic Elastography
- Micro Wishbone Interferometer for Miniature FTIR Spectrometer
- Noise-Enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator
- Micro-Nano Electro Mechanical Systems
- Micro Industry Equipments(Micro Mechanical Engineering)
- A24-041 MICRO INDUSTRY EQUIPMENTS
- 504 Crystallographic orientations and thermal treatments influences on nanomechanics of ultra-thin single crystal silicon (SCS) resonators for ultimate sensing
- Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
- Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
- Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum
- Microassembly of PZT Actuators into Silicon Microstructures
- Synchronized mechanical elements for resonance sensing application
- Fabrication of Anti-Corrosive Capacitive Vacuum Sensors with a Silicon Carbide/Polysilicon Bi-Layer Diaphragm and Electrical Through-Hole Connections on the Opposite Side
- OS6(3)-11(OS06W0429) Micro-Nano Electromechanical Systems by Silicon Bulk-Micromachining
- Resonant Silicon Mass Sensor with Capacitive Readout
- Pattern Transfer of Self-Ordered Structure with Diamond Mold
- Position-Controlled Vertical Growths of Individual Carbon Nanotubes Using a Cage-Shaped Protein
- Novel Design for Optical Scanner with Piezoelectric Film Deposited by Metal Organic Chemical Vapor Deposition
- Nanomechanical Structure with Integrated Carbon Nanotube
- Bimorph Cantilevers Actuated by Focused Laser from the Side
- Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
- Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures
- Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics
- Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges
- High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy