Micro Industry Equipments(<Special Issue>Micro Mechanical Engineering)
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概要
- 論文の詳細を見る
Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and spatial resolution.
- 一般社団法人日本機械学会の論文
- 2004-08-15
著者
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Ono Takahito
Graduate School of Engineering, Tohoku University
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TANAKA Shuji
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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Tanaka S
Graduate School Of Eng. Tohoku University
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ESASHI Masayoshi
New Industry Creation Hatchery Center, Tohoku University
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TANAKA Shuji
Graduate School of Eng., Tohoku University
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Ono Takahito
Graduate School Of Eng. Tohoku University
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Tanaka Shuji
Graduate School Of Eng. Tohoku University
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Esashi Masayoshi
New Industry Creation Hatchery Center (niche) Tohoku University
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- Position-Controlled Vertical Growths of Individual Carbon Nanotubes Using a Cage-Shaped Protein
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- Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
- Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures
- Fabrication of Freestanding Pb(Zr,Ti)O Film Microstructures Using Ge Sacrificial Layer
- Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics
- Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges
- High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package using a Lightly-doped Silicon Chip Carrier
- Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold
- Low-Stress Epitaxial Polysilicon Process for Micromirror Devices
- A low phase noise FBAR based multiband VCO design
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