Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement

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概要

• 論文の詳細を見る

• This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO3 substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20∼280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.

• 社団法人 電気学会の論文
• 2008-05-01

著者

• TANAKA Shuji

  Department of Nanomechanics, Graduate School of Engineering, Tohoku University

• ESASHI Masayoshi

  Micro-Nano Center, Tohoku University

• Esashi Masayoshi

  Micro/nano Machining Research And Education Center Tohoku University

• Tanaka Shuji

  Dep. Of Nanomechanics Graduate School Of Engineering Tohoku Univ.

• HASHIMOTO Shuhei

  Measurement Engineering Department, Nissan Motor Co., Ltd.

• KUYPERS Jan

  Department of Nanomechanics, Tohoku University

• Kuypers Jan

  Department Of Nanomechanics Tohoku University

• Hashimoto Shuhei

  Measurement Engineering Department Nissan Motor Co. Ltd.

• Tanaka Shuji

  Department Of Nanomechanics Tohoku University

• Esashi Masayoshi

  Micro Nanomachining Research And Education Center Graduate School Of Engineering Tohoku University

• Tanaka Shuji

  Department Of Information Electronics Faculty Of Engineering Fukuoka Institute Of Technology

• Tanaka Shuji

  Department Of Electronics Faculty Of Engineering Fukuoka Institute Of Technology

• Tanaka Shuji

  Department of Electronic Materials Engineering, Fukuoka Institute of Technology,

• TANAKA Shuji

  Department of Chemistry, Faculty of Science, Kyushu University

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