Charging Method of Micropatterned Electrets by Contact Electrification Using Mercury
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概要
- 論文の詳細を見る
This paper describes a new charging method for micropatterned electrets. The charging is based on contact electrification, and is performed by dipping an electret into mercury. By this method, 0.5-μm-thick silicon-dioxide electrets whose surfaces were treated by hexamethyldisilazane (HMDS) and a fluorinated silane coupling agent were charged up to $-50$ and $-80$ V, corresponding to a seventh and a forth of the dielectric breakdown limitation, respectively. Micropatterned electrets with line-and-space features were also charged near the surface charge density of the unpatterned electret, but a part of the charges disappeared from both edges of the electrets. The charge stability was propotional to the square of the electret width. This suggests that the charge stability is not dominated by the electret bulk property, but by surface conduction. To reduce the surface conduction, surface modification by the fluorinated silane coupling agent is effective, improving the charge stability by 100 times compared with HMDS treatment.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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Esashi Masayoshi
Department Of Nanomechanics Graduate School Of Engineering Tohoku University
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Tanaka Shuji
Department of Nanomechanics, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Tanaka Shuji
Department of Electronic Materials Engineering, Fukuoka Institute of Technology,
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Genda Takashi
Department of Nanomechanics, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Esashi Masayoshi
Department of Nanomechanics, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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TANAKA Shuji
Department of Chemistry, Faculty of Science, Kyushu University
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