MEMS as Key Components for Systems

スポンサーリンク

概要

• 論文の詳細を見る
• 2006-09-13

著者

• ESASHI Masayoshi

  Department of Nanomechanics, Graduate School of Engineering, Tohoku University

• Esashi Masayoshi

  Department Of Nanomechanics Tohoku University

• Esashi Masayoshi

  Department Of Nanomechanics Graduate School Of Engineering Tohoku University

関連論文

• Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge(Passive Circuits/Components,Emerging Microwave Techniques)
• Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
• Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
• Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
• Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
• MEMS as Key Components for Systems
• MEMS-based Air Turbine with Radial-inflow Type Journal Bearing
• A new bulk - micromachining using deep RIE and wet etching for an accelerometer
• Charging Method of Micropatterned Electrets by Contact Electrification Using Mercury

スポンサーリンク