Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-level Integration of Acoustic Devices and LSI
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概要
- 論文の詳細を見る
- 2010-06-01
著者
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PARK KyeongDong
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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ESASHI Masayoshi
WPI Advanced Institute for Materials Research, Tohoku University
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TANAKA Shuji
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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Esashi Masayoshi
Wpi Advanced Institute For Materials Research Tohoku University
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Park Kyeongdong
Department Of Nanomechanics Graduate School Of Engineering Tohoku University
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Tanaka Shuji
Department Of Nanomechanics Tohoku University
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Tanaka Shuji
Department Of Information Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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Tanaka Shuji
Department Of Nanomechanics Graduate School Of Engineering Tohoku University
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Tanaka Shuji
Department Of Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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TANAKA Shuji
Department of Chemistry, Faculty of Science, Kyushu University
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