A24-041 MICRO INDUSTRY EQUIPMENTS
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概要
- 論文の詳細を見る
Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and special resolution.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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Ono Takahito
Graduate School of Engineering, Tohoku University
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TANAKA Shuji
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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Tanaka S
Graduate School Of Eng. Tohoku University
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ESASHI Masayoshi
New Industry Creation Hatchery Center, Tohoku University
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TANAKA Shuji
Graduate School of Eng., Tohoku University
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Ono Takahito
Graduate School Of Eng. Tohoku University
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Tanaka Shuji
Graduate School Of Eng. Tohoku University
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Esashi Masayoshi
New Industry Creation Hatchery Center (niche) Tohoku University
関連論文
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- Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator
- Application of Screen-Printed Catalytic E1ectrodes to MEMS-Based Fuel Cells (特集:燃料電池を支えるMEMS/NEMS技術)
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Micro Wishbone Interferometer for Miniature FTIR Spectrometer
- Carbon Nanotube on a Si Tip for Electron Field Emitter : Instrumentation, Measurement, and Fabrication Technology
- Microfabrication of 10nm Aperture on Si cantilever for near field optical microscopy
- Noise-Enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator
- Micro-Nano Electro Mechanical Systems
- Micro Industry Equipments(Micro Mechanical Engineering)
- A24-041 MICRO INDUSTRY EQUIPMENTS
- Vertical Diaphragm Electrostatic Actuator for a High Density Ink Jet Printer Head
- 504 Crystallographic orientations and thermal treatments influences on nanomechanics of ultra-thin single crystal silicon (SCS) resonators for ultimate sensing
- Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
- Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
- Nanomechanical Structure with Integrated Carbon Nanotube
- Pattern Transfer of Self-Ordered Structure with Diamond Mold
- Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum
- Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
- MEMS-Based Solid Propellant Rocket Array Thruster with Electrical Feedthroughs
- Diffusion and Electrical Properties of Iron-Related Defects in N-Type Silicon Grown by Czochralski- and Floating Zone Method
- Iron-Related Donor Level in N-Type Silicon
- Investigation of Ni Induced Deep Levels in N-Type Si by a Temperature Dependence of Piezoelectric Photothermal Signals
- Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement
- Modulation of Carbachol-Induced Cl^- Currents and Fluid Secretion by Isoproterenol in Rat Submandibular Acinar Cells
- Role of Calcium Ions in the Potentiation by Isoproterenol of Carbachol-Induced Ionic Currents and Secretion Activity in Rat Salivary Glands
- Distribution of Substitutional Nickel Atoms in Dislocated Silicon Crystal
- In-Diffusion and Annealing Processes of Substitutional Nickel Atoms in Dislocation-Free Silicon
- Aromatic Allylsulfenylation with in Situ Generated Allylic Thiols under the Heck Conditions
- Aromatic Allylsulfenylation with in Situ Generated Allyl Thiols under the Heck Conditions
- Silver(I)-Catalyzed Aminocyclization of 2,3-Butadienyl and 3,4-Pentadienyl Carbamates : An Efficient and Stereoselective Synthesis of 4-Viny-2-oxazolidinones and 4-Vinyltetrahydro-2H-1,3-oxazin-2-ones
- RF-Plasma-Assisted Fast Atom Beam Etching
- Synchronized mechanical elements for resonance sensing application
- MEMS-based Air Turbine with Radial-inflow Type Journal Bearing
- Fabrication of Anti-Corrosive Capacitive Vacuum Sensors with a Silicon Carbide/Polysilicon Bi-Layer Diaphragm and Electrical Through-Hole Connections on the Opposite Side
- OS6(3)-11(OS06W0429) Micro-Nano Electromechanical Systems by Silicon Bulk-Micromachining
- Resonant Silicon Mass Sensor with Capacitive Readout
- Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
- Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
- Distribution of Electrically Active Nickel Atoms in Dislocation-Free N-and P-Type Silicon Crystals Measured by Deep Level Transient Spectroscopy
- Pattern Transfer of Self-Ordered Structure with Diamond Mold
- Electron Emission from Indium Tin Oxide/Silicon Monoxide/Gold Structure
- シリコン骨格の能動カテーテル
- Position-Controlled Vertical Growths of Individual Carbon Nanotubes Using a Cage-Shaped Protein
- Investigation for (100)-/(001)-Oriented Pb(Zr,Ti)O3 Films Using Platinum Nanofacets and PbTiO3 Seeding Layer
- Nano-Probe Sensing and Multi-Probe Data Storage
- Nanomechanical Structure with Integrated Carbon Nanotube
- MEMS-Based Fuel Reformer with Suspended Membrane Structure
- Bimorph Cantilevers Actuated by Focused Laser from the Side
- Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
- Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures
- Fabrication of Freestanding Pb(Zr,Ti)O Film Microstructures Using Ge Sacrificial Layer
- Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics
- Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges
- High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package using a Lightly-doped Silicon Chip Carrier
- Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold
- Low-Stress Epitaxial Polysilicon Process for Micromirror Devices
- A low phase noise FBAR based multiband VCO design
- The Methods of Maintaining Low Frequency Stability in FBAR Based Cross-coupled VCO Design
- Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst
- Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold (Special Issue : Ultrasonic Electronics) -- (Piezoelectric devices (bulk wave devices, surface wave devices))
- Vacuum test of a micro-solid propellant rocket array thruster