Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
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概要
- 論文の詳細を見る
A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.
- The Institute of Electrical Engineers of Japanの論文
- 2011-07-01
著者
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Esashi Masayoshi
The World Premier International Res. Center Initiative For Atom Molecule Materials Tohoku Univ.
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Ono Takahito
Graduate School Of Eng. Tohoku University
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Ono Takahito
Dep. Of Mechanical System And Design Graduate School Of Engineering Tohoku Univ.
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Jiang Yonggang
School Of Mechanical Engineering And Automation Beihang University
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