Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
-
Sasaki Minoru
Department of Acoustic Design,Kyushu Institute of Design
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Singh V
Tohoku Univ. Sendai Jpn
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Hane Kazuhiro
Department Of Mechatronics And Precision Engineering Tohoku University
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ESASHI Masayoshi
New Industry Creation Hatchery Center, Tohoku University
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SINGH Vijay
Department of Nanomechanics Engineering, Tohoku University
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