Microfabrication of 10nm Aperture on Si cantilever for near field optical microscopy
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概要
- 論文の詳細を見る
- 1999-09-01
著者
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Minh P
Tohoku Univ. Sendai Jpn
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ESASHI Masayoshi
New Industry Creation Hatchery Center, Tohoku University
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Esashi Masayoshi
New Industry Creation Hatchery Center Tohoku University
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ONO Takahito
Faculty of Engineering, Tohoku University
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MINH Phan
Faculty of Engineering, Tohoku University
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Ono Takahito
Faculty Of Engineering Tohoku University
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Esashi Masayoshi
New Industry Creation Hatchery Center (niche) Tohoku University
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