RF-Plasma-Assisted Fast Atom Beam Etching

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• ESASHI Masayoshi

  New Industry Creation Hatchery Center, Tohoku University

• Esashi Masayoshi

  New Industry Creation Hatchery Center Tohoku University

• ONO Takahito

  Faculty of Engineering, Tohoku University

• Ono Takahito

  Faculty Of Engineering Tohoku University

• Esashi Masayoshi

  New Industry Creation Hatchery Center Tohoku Univ.

• ORIMOTO Norimune

  Faculty of Engineering, Tohoku University

• LEE Seungseoup

  Faculty of Engineering, Tohoku University

• SIMIZU Toshiki

  Faculty of Engineering, Tohoku University

• Lee Seungseoup

  Faculty Of Engineering Tohoku University

• Simizu Toshiki

  Faculty Of Engineering Tohoku University

• Orimoto Norimune

  Faculty Of Engineering Tohoku University

• Esashi Masayoshi

  New Industry Creation Hatchery Center (niche) Tohoku University

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• RF-Plasma-Assisted Fast Atom Beam Etching
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